BS75A-R/RS by Sony
High accuracy laser scales with a low expansion coefficient that provide reliable, high-precision measuring with a resolution selectable from 0.0086 Ám and 0.1 Ám (BD60)
Comparable to the laser interferometer in accuracy and resolution.
Has a built-in high accuracy optical zero point.
Various measuring lengths ranging from 30 to 410mm 9 models.
Easy to install and adjust like Magnescale
Little affected by disturbed air and changing temperature and atmospheric pressure
Various interface modes
Applications- semiconductor manufacture, inspection, precision machining and testing.