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The Magnescale BS78 is a compact LASERSCALE with a zero point boosting a resolution of 0.14nm that's capable of high accuracy and high speed measuring supporting the next generation semiconductor design rule.
The Magnescale BS78 compact no-contact LASERSCALE offers the following features...
- Accuracy: ±0.04µm or better (for a measuring of 40mm)
- Resolution of 0.14nm
- High-resolution scale with signal wavelength of 0.1379µm
- High stability not affected by humidity, air pressure, and air disturbances
- Newly designed optics used in zero point
- Half in volume with zero point comparing to previous model
- Zero point accuracy ±0.1µm
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