Two reference marks, one for each measuring direction, serve to reproduce a datum.
Measuring standard - Two-coordinate DIADUR phase grating on glass Output signals - 11uApp Signal period - 4 um Accuracy grades - ± 1 µm Recommended measuring steps - 1 um to 0.01 µm Measuring lengths - 68 mm x 68 mm (other ranges available upon request) Reference mark One per measuring direction